CS EUV Technical Support Engineer (Source) Tainan

The EUV Source Technical Support Engineer is responsible for supporting and maintaining EUV source competency stability and availability for EUV lithography systems in semiconductor manufacturing environments. The role provides advanced technical expertise to diagnose analyze and resolve EUV source related issues to ensure system performance meets operational and manufacturing requirements.

This position works closely with customers field service teams and internal engineering organizations to investigate performance deviations perform root cause analysis and implement corrective and preventive actions. The role contributes to system uptime productivity and longterm reliability through proactive monitoring data analysis and continuous improvement activities.

The EUV Source Technical Support Engineer operates in a technically complex customerfacing environment and plays a key role in maintaining stable EUV operations and supporting highvolume manufacturing objectives.

The EUV Source Technical Support Engineer ensures optimal EUV performance availability and reliability in highvolume semiconductor manufacturing environments. The role applies deep technical expertise to troubleshoot complex issues optimize system performance and act as a trusted technical partner to customers and internal stakeholders.

• Monitor analyze and optimize EUV source power stability and availability to meet customer manufacturing requirements.

• Diagnose performance degradations related to EUV source subsystems (laser droplets collector vacuum and diagnostics).

• Perform advanced root cause analysis for EUV Source issues using system logs sensor data and trend analysis.

• Lead technical investigations on recurring or high-impact performance issues and define corrective actions.

• Provide on-site and remote technical support to resolve complex performance problems efficiently.

• Act as a trusted technical advisor to customers on EUV source performance limitations and best operating practices.

• Communicate technical findings status updates and improvement plans clearly to customer engineering and management teams.

• Develop and implement preventive maintenance recommendations.

• Document technical cases lessons learned and best practices to enhance organizational knowledge.

• Contribute to technical guidelines troubleshooting procedures and training materials for field teams.

• Support cross-site knowledge sharing to improve global EUV support capability.

• Bachelors degree or equivalent experience.

• 1-2 years technical knowledge of EUV Source preferred.

• Familiarity with EUV Source competency performance preferred.

Skills

• EUV Source & related Systems Knowledge
  Understanding of EUV source architecture power generation stability drivers and degradation mechanisms.

• Advanced Troubleshooting
  Ability to diagnose complex EUV source and performance issues using structured problemsolving methods.

• Root Cause Analysis (RCA)
  Experience leading technical investigations and defining corrective and preventive actions.

• Semiconductor Manufacturing Environment
  Familiarity with fab operations highvolume manufacturing constraints and uptime requirements.

• Data Analysis & Interpretation
  Ability to analyze system logs sensor data performance trends and reliability metrics.

• System Performance Optimization
  Skills in identifying performance gaps and implementing optimization or preventive improvements.

• Technical Documentation
  Ability to document findings procedures and best practices clearly and accurately.

• Working model as day shift and late shift